A Dual-Electrode MEMS Speaker Based on Ceramic PZT with Improved Sound Pressure Level by Phase Tuning
Author:
Funder
National Institutes of Health
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9375130/9375148/09375295.pdf?arnumber=9375295
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. On the Design and Modeling of a Full-Range Piezoelectric MEMS Loudspeaker for In-Ear Applications;Journal of Microelectromechanical Systems;2023-12
2. MEMS audio speakers *;Journal of Micromechanics and Microengineering;2023-11-29
3. A PZT MEMS loudspeaker with a quasi-closed diaphragm;Sensors and Actuators A: Physical;2023-08
4. High performance piezoelectric MEMS loudspeaker based on an innovative wafer bonding process;Sensors and Actuators A: Physical;2023-08
5. On the design of a two-way piezoelectric MEMS microspeaker based on a multi-shape cantilever array for high-frequency applications;Journal of Micromechanics and Microengineering;2023-05-23
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