SAW propagation characteristics and fabrication technology of piezoelectric thin film/diamond structure-Reference-Cited by-同舟云学术

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SAW propagation characteristics and fabrication technology of piezoelectric thin film/diamond structure

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Container-title:Proceedings., IEEE Ultrasonics Symposium
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Author:

Yamanouchi K.,Sakurai N.,Satoh T.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx2/857/2385/00067007.pdf?arnumber=67007

Cited by 80 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Analysis of Sezawa mode Rayleigh-type SAWs on ScAlN film/floated electrode layer/ScAlN film/high velocity substrates;Japanese Journal of Applied Physics;2024-02-23

2. Theoretical investigation of Rayleigh surface acoustic wave propagation characteristics in c-axis-zigzag ScAlN film/silicon substrate structure;Journal of Applied Physics;2023-05-23

3. High electro-mechanical coupling coefficient SAW device with ScAlN on diamond;Japanese Journal of Applied Physics;2023-02-01

4. Enhancement of coupling factor in 0th to 4th mode Rayleigh surface acoustic waves on polarity inverted multilayered ScAlN film/AlN and BN substrates;Japanese Journal of Applied Physics;2022-05-31

5. c-Axis-tilted ScAlN films grown on silicon substrates for surface acoustic wave devices;Japanese Journal of Applied Physics;2022-05-30

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