Abstract
Abstract
In this study, Sc concentration dependence of Sc
x
Al1−x
N/AlN/poly-crystalline diamond/Si surface acoustic wave (SAW) characteristics at high Sc from 23.8% to 44.3% was investigated by fabricating one-port SAW resonator at high frequency. 3.8 GHz one-port resonator fabricated on Sc0.43Al0.57N showed an excellent performance of electro-mechanical coupling coefficient (K
2) as high as 6.34% for 2nd mode Sezawa wave, which enables a wide bandwidth in high frequency applications. The temperature coefficient of frequency was approximately −40 to −50 ppm deg−1 for the device fabricated with Sc concentration of 42.9%. This is a smaller value compared to conventional high K2 bulk materials such as LiNbO3. As the result, a high K2 6.34% material system at a higher Sc concentration of ScAlN/AlN/PCD was found to be possible at a high phase velocity of 7000 m s−1. Combined with the extremely high-power durability of diamond based device, high-power durable wideband SAW device at high frequency can be expected.
Funder
Ministry of Internal Affairs and Communications
Murata Science Foundation
Subject
General Physics and Astronomy,General Engineering
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献