Mechanical structure optimization design of fiber Fabry-Perot pressure sensor sensitive diaphragm
Author:
Affiliation:
1. Shandong University of Science and Technology,Qingdao,China
2. Qingdao National Laboratory of Marine Science and Technology,Qingdao,China
Funder
National Natural Science Foundation of China
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9980888/9980890/09981011.pdf?arnumber=9981011
Reference9 articles.
1. Composite structure piezoresistive MEMS pressure sensor research;tran;South China University of Technology,2018
2. Design, Fabrication, and Implementation of an Array-Type MEMS Piezoresistive Intelligent Pressure Sensor System
3. Optical Fiber Fabry–Pérot Pressure Sensor Based on a Polymer Structure
4. Sensitivity analysis of fiber Fabry-Perot composite refractive index sensor;gong;Papers Phys,2011
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