Aluminum Scandium Nitride for mm-Wave Acoustic Filtering: Challenges and Outlook
Author:
Affiliation:
1. Georgia Institute of Technology,School of Electrical and Computer Engineering,Atlanta,GA,USA
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10272029/10272034/10272126.pdf?arnumber=10272126
Reference10 articles.
1. Reconfigurable Transfer Function BST Acoustic Wave Lumped Element Resonator Filters
2. Self-Heating and Quality Factor: Thermal Challenges in Aluminum Scandium Nitride Bulk Acoustic Wave Resonators
3. Epitaxial Aluminum Scandium Nitride Super High Frequency Acoustic Resonators
4. Growth-microstructure-thermal property relations in AlN thin films
5. A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films
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