A Self-Sustained Mass Sensor With Physical Closed Loop Based on Thermal-Piezoresistive Coupled Resonators
Author:
Affiliation:
1. Department of Electrical Engineering (ESAT)-MNS, KU, Leuven, Leuven, Belgium
Funder
CSC-IMEC-KU Leuven Scholarships through the FWO Project
European Union’s Horizon 2020 Research and Innovation Program under the Marie Skłodowska-Curie IF
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Link
http://xplorestaging.ieee.org/ielx7/16/9901396/09861411.pdf?arnumber=9861411
Reference29 articles.
1. Squeeze film air damping in MEMS;bao;Sens Actuators A Phys,2007
2. Thermal-Piezoresistive Resonators and Self-Sustained Oscillators for Gas Recognition and Pressure Sensing
3. Thermal-Piezoresistive SOI-MEMS Oscillators Based on a Fully Differential Mechanically Coupled Resonator Array for Mass Sensing Applications
4. Piezoresistive heat engine and refrigerator
5. A self-sustained nanomechanical thermal-piezoresistive oscillator with ultra-low power consumption
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