Experimental Verification of Coupling Strength on the Mode-Localization in Single MEMS DETF Resonators and Its Application as a Force Sensor-Reference-Cited by-同舟云学术

Experimental Verification of Coupling Strength on the Mode-Localization in Single MEMS DETF Resonators and Its Application as a Force Sensor

Published:2024-07 Issue:7 Volume:71 Page:4292-4299
ISSN:0018-9383
Container-title:IEEE Transactions on Electron Devices
language:
Short-container-title:IEEE Trans. Electron Devices

Author:

Rehman Masood Ur¹^ORCID,Saleem Muhammad Mubasher²^ORCID,Tiwana Mohsin Islam²,Shakoor Rana Iqtidar³,Bazaz Shafaat Ahmed⁴,Cheung Rebecca⁵^ORCID

Affiliation:

1. Department of Mechatronics Engineering, National University of Sciences and Technology, Islamabad, Pakistan

2. Department of Mechatronics Engineering, National University of Sciences and Technology (NUST), Islamabad, Pakistan

3. Department of Mechatronics Engineering, Air University, Islamabad, Pakistan

4. Faculty of Engineering and Technology, Superior University, Lahore, Pakistan

5. Institute for Integrated Micro and Nano Systems, School of Engineering, Scottish Microelectronics Centre, The University of Edinburgh, Edinburgh, U.K.

Funder

Higher Education Commission (HEC) Pakistan

British Council U.K. within the Framework of the Innovative and Collaborative Research Partnership grants program

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx8/16/10566499/10547203.pdf?arnumber=10547203

Reference32 articles.

1. Figure-of-Merit Enhancement for Laterally Vibrating Lithium Niobate MEMS Resonators

2. Frequency Stability of RF-MEMS Disk Resonators

3. Micromachined Resonators: A Review

4. A Micromachined Resonant Differential Pressure Sensor

5. Piezoresistive Transduction in a Double-Ended Tuning Fork SOI MEMS Resonator for Enhanced Linear Electrical Performance