A Steep Slope MBE-Grown Thin p-Ge Channel FETs on Bulk Ge-on-Si Using HZO Internal Voltage Amplification

Author:

Choudhary Sumit1ORCID,Schwarz Daniel2ORCID,Funk Hannes S.2ORCID,Weishaupt D.2ORCID,Khosla Robin2ORCID,Sharma Satinder K.1ORCID,Schulze Jorg2ORCID

Affiliation:

1. School of Computing and Electrical Engineering, IIT Mandi, Mandi, India

2. Institute of Semiconductor Engineering, University of Stuttgart, Stuttgart, Germany

Funder

Department of Science and Technology-German Academic Exchange Service

Visvesvaraya PhD Scheme, MeitY, Government of India

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Reference39 articles.

1. Nano-scaled Ge FinFETs with low temperature ferroelectric HfZrOx on specific interfacial layers exhibiting 65% S.S. Reduction and improved $\text{I}_{\text{ON}}$;su;Symp VLSI Technol Dig Tech Papers,2017

2. Ferroelectric HfZrOx Ge and GeSn PMOSFETs with sub-60 mV/decade subthreshold swing, negligible hysteresis, and improved $\text{I}_{\text{ds}}$;zhou;IEDM Tech Dig,2016

3. Direct and Indirect Band-to-Band Tunneling in Germanium-Based TFETs

4. Comparative Leakage Analysis of GeOI FinFET and Ge Bulk FinFET

5. Optimisation and scaling of interfacial GeO2 layers for high-κ gate stacks on germanium and extraction of dielectric constant of GeO2

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