A Micro-Oven-Controlled Dual-Mode Piezoelectric MEMS Resonator With ±400 PPB Stability Over −40 to 80 °C Temperature Range
Author:
Affiliation:
1. The Institute of Technological Sciences, Wuhan University, Wuhan, Hubei, China
Funder
National Natural Science Foundation of China
Fundamental Research Funds for the Central Universities
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Link
http://xplorestaging.ieee.org/ielx7/16/9761777/09741792.pdf?arnumber=9741792
Reference30 articles.
1. A High-Performance 9.5% Scandium-Doped Aluminum Nitride Piezoelectric MEMS Hydrophone With Honeycomb Structure
2. Electronically Temperature Compensated Silicon Bulk Acoustic Resonator Reference Oscillators
3. Micromechanical IBARs: Tunable High-$Q$ Resonators for Temperature-Compensated Reference Oscillators
4. Wafer-Level Vacuum-Packaged High-Performance AlN-on-SOI Piezoelectric Resonator for Sub-100-MHz Oscillator Applications
5. A 3 ppm 1.5 × 0.8 mm 2 1.0 µA 32.768 kHz MEMS-Based Oscillator
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1. A Temperature-Drift Suppression Phase-Locked-Loop With Tunable Locked Range and Frequency Division for MEMS Resonant Accelerometers;IEEE Sensors Journal;2024-03-01
2. A Review of Eigenmode and Frequency Control in Piezoelectric MEMS Resonators;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2023-10
3. The Oven-Controlled MEMS Oscillators in Timing and Sensing Applications: A Review;IEEE Sensors Journal;2023-08-15
4. A Micro-Oven Controlled Dual-Mode Piezoelectric MEMS Resonator With ± 190 ppb Stability Over −40 to 105 °C Temperature Range;IEEE Electron Device Letters;2023-08
5. A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators;Micromachines;2023-06-09
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