The Oven-Controlled MEMS Oscillators in Timing and Sensing Applications: A Review
Author:
Affiliation:
1. College of Information Science and Technology, Beijing University of Chemical Technology, Beijing, China
2. Guangdong Institute of Semiconductor Micro-Nano Manufacturing Technology, Guangdong, China
Funder
National Natural Science Foundation of China
Fundamental Research Funds for the Central Universities
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/10217055/10176186.pdf?arnumber=10176186
Reference66 articles.
1. Electronically Temperature Compensated Silicon Bulk Acoustic Resonator Reference Oscillators
2. A 1 MHz 4 ppm CMOS-MEMS oscillator with built-in self-test and sub-mW ovenization power
3. A Monolithic CMOS-MEMS Oscillator Based on an Ultra-Low-Power Ovenized Micromechanical Resonator
4. An ovenized CMOS-MEMS oscillator with isothermal resonator and sub-mW heating power
5. On-chip ovenization of encapsulated Disk Resonator Gyroscope (drg)
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