Manufacturing Cost Saving Through Reduced Metrology Using Time Series Analysis-Reference-Cited by-同舟云学术

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Manufacturing Cost Saving Through Reduced Metrology Using Time Series Analysis

Published:2023-05-01 Issue: Volume: Page:
ISSN:
Container-title:2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
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Author:

Sedhain Ashok¹,Good Richard²,Kim Jessica³,Milosevic Erik⁴,Vaid Alok⁵

Affiliation:

1. Globalfoundries Inc., Fab8,AME Metrology,Malta,NY,USA

2. Globalfoundries Inc., Fab8,Process Engineering Controls,Malta,NY,USA

3. Process Integration, Globalfoundries Inc., Fab8,Malta,NY,USA

4. AME Etch, Globalfoundries Inc.,Fab8,Malta,NY,USA

5. Globalfoundries Inc., Fab8,Advanced Module Engineering,Malta,NY,USA

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10121052/10121025/10121073.pdf?arnumber=10121073

Reference5 articles.

1. Missing data estimation for run-to-run EWMA-controlled processes

2. Statistical Process Control by Monitoring and Feedback Adjustment;box,1997

3. Generalized Inverse of Matrices and Applications;rao,1971

4. Time Series Analysis: Forecasting and Control;box,1976

5. Compensating for the Initialization and Sampling of EWMA Run-to-Run Controlled Processes

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The Value of In-Line Metrology for Advanced Process Control: AM: Advanced Metrology;2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2024-05-13

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