Analysis Sensing Voltage of lead zirconate titanate (PZT) Piezoelectric MEMS Gyroscope and comparing with Aluminum Nitride (AlN), Zinc Oxide (ZnO) and Barium titanate (BaTiO3)-Reference-Cited by-同舟云学术

Analysis Sensing Voltage of lead zirconate titanate (PZT) Piezoelectric MEMS Gyroscope and comparing with Aluminum Nitride (AlN), Zinc Oxide (ZnO) and Barium titanate (BaTiO3)

Published:2023-07-18 Issue: Volume: Page:
ISSN:
Container-title:2023 International Telecommunications Conference (ITC-Egypt)
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Author:

Ghamry Sherif A.¹,Mahmoud Ahmed K.²,Abdelrassoul Roshdy A.¹,Morsi Iman G.¹

Affiliation:

1. Arab Academy for Science and Technology,Electronics and Communications Engineering,Alexandria,Egypt

2. Air Defense College,Electrical and Electronic Engineering,Alexandria,Egypt

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10206047/10206045/10206106.pdf?arnumber=10206106

Reference13 articles.

1. Sensitivity Voltage Analysis for Piezoelectric MEMS Gyroscope using Aluminum Nitride (AlN), Zinc Oxide (ZnO) and Barium titanate (BaTiO3)

2. Lead zirconate titanate MEMS accelerometer using interdigitated electrodes;yua;Sensors and Actuators,2003

3. Future voyage data recorder based on multi-sensors and human machine interface for marine accident

4. A Review of MEMS Vibrating Gyroscopes and Their Reliability Issues in Harsh Environments

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