Sensitivity Voltage Analysis for Piezoelectric MEMS Gyroscope using Aluminum Nitride (AlN), Zinc Oxide (ZnO) and Barium titanate (BaTiO3)

Author:

Ghamry Sherif A.1,Mahmoud Ahmed K.2,Abdelrassoul Roshdy A.1,Morsi Iman G.1

Affiliation:

1. Arab Academy for Science and Technology,Electronics and Communications Engineering,Alexandria,Egypt

2. Air Defense College,Electrical and Electronic Engineering,Alexandria,Egypt

Publisher

IEEE

Reference13 articles.

1. Modeling a Double-Tuning-Fork MEMS Gyroscope;ediger;licensed under the COMSOL Software License Agreement COMSOL Blog,2019

2. Enhancing Vibration Robustness and Noise in Automotive Gyroscope with Large Drive Motion and Levered Sense Mode

3. Characterizing Barium Titanate Piezoelectric Material Using the Finite Element Method;butt;Transactions on Electrical and Electronic Materials,2017

4. Future voyage data recorder based on multi-sensors and human machine interface for marine accident

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1. A Comparative Study for Designing SAW Gas Sensor using Different MEMS Piezoelectrical Materials based on COMSOL;2024 6th International Youth Conference on Radio Electronics, Electrical and Power Engineering (REEPE);2024-02-29

2. Sensing voltage of MEMS Accelerometer using Polycrystalline Silicon (Si),Gallium Arsenide (GaAs) and Germanium (Ge);2024 6th International Youth Conference on Radio Electronics, Electrical and Power Engineering (REEPE);2024-02-29

3. Famous Digital Signatures Used In Smart Contracts;2023 International Telecommunications Conference (ITC-Egypt);2023-07-18

4. Novel Design of Voltage Controlled Oscillator (VCO) using MEMS Switch;2023 International Telecommunications Conference (ITC-Egypt);2023-07-18

5. Analysis Sensing Voltage of lead zirconate titanate (PZT) Piezoelectric MEMS Gyroscope and comparing with Aluminum Nitride (AlN), Zinc Oxide (ZnO) and Barium titanate (BaTiO3);2023 International Telecommunications Conference (ITC-Egypt);2023-07-18

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