Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Cited by
18 articles.
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1. Real-time focus and overlay measurement by the use of fluorescent markers;Metrology, Inspection, and Process Control for Microlithography XXVIII;2014-04-14
2. Characteristics of a scanning nano-slit image sensor for line-and-space patterns;Applied Optics;2010-06-30
3. Direct, in-scanner, aerial image sensing;Microelectronic Engineering;2006-04
4. Integrated aerial image sensor: Design, modeling, and assembly;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2006
5. High-frame-rate deep-ultraviolet-optimized charge-coupled device for simultaneous measurements of illumination intensity, polarization amplitude, and polarization direction for very high numerical aperture imaging systems;Journal of Micro/Nanolithography, MEMS, and MOEMS;2005-07-01