Fabrication and characterization of micromachined high-frequency tonpilz transducers derived by PZT thick films-Reference-Cited by-同舟云学术

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Fabrication and characterization of micromachined high-frequency tonpilz transducers derived by PZT thick films

Published:2005-03 Issue:3 Volume:52 Page:350-357
ISSN:0885-3010
Container-title:IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
language:
Short-container-title:IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

Author:

Qifa Zhou ,Cannata J.M.,Meyer R.J.,Van Tol D.J.,Tadigadapa S.,Hughes W.J.,Shung K.K.,Trolier-McKinstry S.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Acoustics and Ultrasonics,Instrumentation

Link

http://xplorestaging.ieee.org/ielx5/58/30673/01417256.pdf?arnumber=1417256

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