Suprious-Free, Near-Zero-TCF Hetero Acoustic Layer (HAL)SAW Resonators Using LiTaO3 Thin Plate on Quartz-Reference-Cited by-同舟云学术

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Suprious-Free, Near-Zero-TCF Hetero Acoustic Layer (HAL)SAW Resonators Using LiTaO3 Thin Plate on Quartz

Published:2018-10 Issue: Volume: Page:
ISSN:
Container-title:2018 IEEE International Ultrasonics Symposium (IUS)
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Author:

Kadota Michio,Ishii Yoshimi,Shimatsu Takehito,Uomoto Miyuki,Tanaka Shuji

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/8556632/8579609/08580111.pdf?arnumber=8580111

Cited by 37 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Analysis Method for the Influence of Parasitic Surface Conductivity on Silicon-Based Surface Acoustic Wave Devices;IEEE Transactions on Electron Devices;2024-06

2. Higher Order Mode Elimination for SAW Resonators Based on LiNbO₃/SiO₂/poly-Si/Si Substrate by Si Orientation Optimization;Journal of Microelectromechanical Systems;2024-04

3. SAW velocity reduction and spurious modes suppression on the layer structure;Japanese Journal of Applied Physics;2024-02-15

4. Use of periodically slotted SiO₂ in a layered surface acoustic wave structure for transverse mode suppression;Japanese Journal of Applied Physics;2024-01-30

5. Behaviors of higher-order modes in I.H.P. SAW devices and discussion of their suppression;Japanese Journal of Applied Physics;2024-01-29

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