A MEMS Coriolis-Based Mass-Flow-to-Digital Converter for Low Flow Rate Sensing-Reference-Cited by-同舟云学术

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A MEMS Coriolis-Based Mass-Flow-to-Digital Converter for Low Flow Rate Sensing

Published:2022-12 Issue:12 Volume:57 Page:3681-3692
ISSN:0018-9200
Container-title:IEEE Journal of Solid-State Circuits
language:
Short-container-title:IEEE J. Solid-State Circuits

Author:

de Oliveira Arthur Campos¹^ORCID,Pan Sining²^ORCID,Wiegerink Remco J.³^ORCID,Makinwa Kofi A. A.¹

Affiliation:

1. Department of Microelectronics, Electronic Instrumentation Laboratory, Delft University of Technology, Delft, CD, The Netherlands

2. Department of Electrical Engineering, Tsinghua University, Beijing, China

3. Integrated Devices and Systems Group, University of Twente, Enschede, NB, The Netherlands

Funder

research program FLOW+

Dutch Technology Foundation STW and industrial partners Bronkhorst BV and KROHNE

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering

Link

http://xplorestaging.ieee.org/ielx7/4/9962295/09919226.pdf?arnumber=9919226

Reference44 articles.

1. A High Dynamic-Range Neural Recording Chopper Amplifier for Simultaneous Neural Recording and Stimulation

2. A Low Area, Switched-Resistor Based Fractional-N Synthesizer Applied to a MEMS-Based Programmable Oscillator

3. A Sub-0.1°/h Bias-Instability Split-Mode MEMS Gyroscope With CMOS Readout Circuit

4. A 141- $\mu$ W High-Voltage MEMS Gyroscope Drive Interface Circuit Based on Flying Capacitors

5. A 3-axis gyroscope for electronic stability control with continuous self-test;balachandran;IEEE J Solid-State Circuits,2016

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Highly Sensitive Dual-Mode Thermal Flow Sensor Based on Calorimetric Mode;IEEE Sensors Journal;2024-01-15

2. Non-Invasive Determination of the Mass Flow Rate for Particulate Solids Using Microwaves;Sensors;2023-12-14

3. Modeling, Fabrication, and Testing of a 3D-Printed Coriolis Mass Flow Sensor;Sensors;2023-04-18

4. A Sub-5mW Monolithic CMOS-MEMS Thermal Flow Sensing SoC With $\pm$6 m/s Linear Range;IEEE Journal of Solid-State Circuits;2023

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