Based on Deep Learning CD-SEM Image Defect Detection System
Author:
Affiliation:
1. Wuhan Xinxin Semiconductor Manufacturing Co., Ltd. (XMC),Wuhan,China
Funder
Wuhan Xinxin Semiconductor Manufacturing Company
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9856647/9856709/09856857.pdf?arnumber=9856857
Reference5 articles.
1. You Only Look Once: Unified, Real-Time Object Detection
2. Convolutional Neural Network for Wafer Surface Defect Classification and the Detection of Unknown Defect Class
3. YOLO9000: Better, Faster, Stronger
4. An Active Deep Learning Method for the Detection of Defects in Power Semiconductors
5. Adversarial Defect Detection in Semiconductor Manufacturing Process
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Machine Learning Based SEM Image Analysis for Automatic Detection and Classification of Wafer Defects;2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2024-05-13
2. Fast and accurate automatic wafer defect detection and classification using machine learning based SEM image analysis;Metrology, Inspection, and Process Control XXXVIII;2024-04-10
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