Fast and accurate automatic wafer defect detection and classification using machine learning based SEM image analysis

Author:

Choi Sanghyun,Xie Qian,Greeneltch Nathan G.,Lee Hyung Joo,Govindaraj Mohan,Jayaram Srividya,Pereira Mark,Biswas Sayani,Bhamidipati Samir,Torunoglu Ilhami

Publisher

SPIE

Reference12 articles.

1. You Only Look Once: Unified, Real-Time Object Detection,;Redmon;arXiv (Cornell University),2015

2. Automated Semiconductor Defect Inspection in Scanning Electron Microscope Images: a Systematic Review,;Lechien;arXiv (Cornell University),2023

3. Optimizing yolov7 for semiconductor defect detection,;Dehaerne;Metrology, Inspection, and Process Control XXXVII,2023

4. Based on Deep Learning CD-SEM Image Defect Detection System

5. Towards improving challenging stochastic defect detection in SEM images based on improved YOLOv5

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