A GHz Operating CMOS Compatible ScAlN Based SAW Resonator Used for Surface Acoustic Waves/Spin Waves Coupling-Reference-Cited by-同舟云学术

A GHz Operating CMOS Compatible ScAlN Based SAW Resonator Used for Surface Acoustic Waves/Spin Waves Coupling

Published:2022-09 Issue:9 Volume:43 Page:1551-1554
ISSN:0741-3106
Container-title:IEEE Electron Device Letters
language:
Short-container-title:IEEE Electron Device Lett.

Author:

Zdru I.¹,Nastase C.¹^ORCID,Hess L. N.²,Ciubotaru F.³^ORCID,Nicoloiu A.¹^ORCID,Vasilache D.¹^ORCID,Dekkers M.⁴,Geilen M.²^ORCID,Ciornei C.¹^ORCID,Boldeiu G.¹^ORCID,Dinescu A.¹^ORCID,Adelmann C.³^ORCID,Weiler M.²,Pirro P.²^ORCID,Muller A.¹^ORCID

Affiliation:

1. IMT-Bucharest, Bucharest, Romania

2. Fachbereich Physik and Landesforschungszentrum OPTIMAS, Technische Universität Kaiserslautern, Kaiserslautern, Germany

3. IMEC, Leuven, Belgium

4. Solmates, PE Enschede, Netherlands

Funder

European Commission under Project H2020 FET-Open Research Programthrough the CHIRON Project

Ministry of Research, Innovation and Digitization

German Research Foundation

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject