Atmospheric Pressure Electron Detection Method for MEMS Electron Microscope
Author:
Affiliation:
1. Department of Microsystems, Faculty of Electronics, Photonics and Microsystem, Wroclaw University of Science and Technology, Wroclaw, Poland
Funder
Narodowe Centrum Nauki
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Link
http://xplorestaging.ieee.org/ielx7/55/9762988/09743980.pdf?arnumber=9743980
Reference13 articles.
1. Scanning drift tube measurements of electron transport parameters in different gases: argon, synthetic air, methane and deuterium
2. Electron swarm parameters and Townsend coefficients of atmospheric corona discharge plasmas by considering humidity;chen;Phys Plasmas,2018
3. Influence of total beam current on HRTEM image resolution in differentially pumped ETEM with nitrogen gas
4. Probing electron beam effects with chemoresistive nanosensors during in situ environmental transmission electron microscopy
5. Field-emission electron gun for a MEMS electron microscope
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Imaging Using Mems Electron Microscope;2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC);2023-07-10
2. Signal detection and imaging methods for MEMS electron microscope;Ultramicroscopy;2023-02
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