Signal detection and imaging methods for MEMS electron microscope

Author:

Białas M.,Grzebyk T.,Krysztof M.ORCID,Górecka-Drzazga A.

Funder

Narodowe Centrum Nauki

Publisher

Elsevier BV

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. Wide-band detector for micro-microampere low-energy electron currents;Everhardt;J. Sci. Instrum.,1960

2. Sharing of secondary electrons by in-lens and out-lens detector in low-voltage scanning electron microscope equipped with immersion lens;Kumagai;Ultramicroscopy,2009

3. A comparison of conventional everhart-thornley style and in-lens secondary electron detectors – a further variable in scanning electron microscopy;Griffin;Scanning,2011

4. Scanning Electron Microscopy. Physics of Image Formation and Microanalysis;Reimer,2010

5. Scanning Electron Microscopy and X-ray Microanalysis;Goldstein,2003

Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Imaging Using Mems Electron Microscope;2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC);2023-07-10

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