1. State Key Laboratory of Crystal Materials, Institute of Novel Semiconductor Materials, Shandong University, Jinan, China
2. Jinan Diamond Technology Company Ltd., Jinan, China
3. Electronic Materials Research Group, School of Materials and Mineral Resources Engineering, University Sains Malaysia, Nibong Tebal, Penang, Malaysia
4. Queensland Micro and Nanotechnology Centre, Griffith University, Nathan, QLD, Australia
5. Inter-University Micro-Electronics Centre (IMEC), Leuven, Belgium