A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators-Reference-Cited by-同舟云学术

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A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators

Published:2024-01-21 Issue: Volume: Page:903-906
ISSN:
Container-title:2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Wang Chen¹,Quan Aojie¹,Wang Linlin¹,Esteves Rui Amendoeira¹,Wang Yuan²,Madeira Bernardo P.¹,Guan Yangyang¹,Wu Xinyu¹,Kuznetsova Nadezda¹,Shojaeian Milad¹,Zhang Pan³,Mak Pui-In²,Kraft Michael¹

Affiliation:

1. MNS, University of Leuven,ESAT Department,Belgium

2. University of Macau,Institute of Microelectronics,P. R. China

3. Peking University,National Key Laboratory of Advanced Micro and Nano Manufacture Technology, School of Integrated Circuits,P. R. China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10439241/10439292/10439523.pdf?arnumber=10439523

Reference7 articles.

1. Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review

2. A high-performance resonant MEMS accelerometer with a residual bias error of 30 μg and scale factor repeatability of 2 ppm

3. A vibrating beam MEMS accelerometer for gravity and seismic measurements

4. Experimental Observation of Temperature and Pressure Induced Frequency Fluctuations in Silicon MEMS Resonators

5. A MEMS piezoelectric in-plane resonant accelerometer based on aluminum nitride with two-stage microleverage mechanism

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