3.8×3.8 mm<sup>2</sup> Tiny Piezoelectric Resonant MEMS Scanner Using Fork-Shaped and Ring-Shaped Actuators-Reference-Cited by-同舟云学术

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3.8×3.8 mm² Tiny Piezoelectric Resonant MEMS Scanner Using Fork-Shaped and Ring-Shaped Actuators

Published:2024-01-21 Issue: Volume: Page:162-165
ISSN:
Container-title:2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
language:
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Author:

Okamoto Yuki¹,Gorwadkar Sucheta¹,Takei Yusuke¹,Okada Hironao¹

Affiliation:

1. National Institute of Advanced Industrial Science and Technology (AIST),Japan

Funder

University of Tokyo

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10439241/10439292/10439483.pdf?arnumber=10439483

Reference12 articles.

1. MEMS Laser Scanners: A Review

2. MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan

3. MEMS-based pico projector display

4. High-Resolution Piezoelectric Mems Scanner Fully Integrated With Focus-Tuning and Driving Actuators

5. Via-Less Two-Axis Electromagnetic Scanner Using An Asymmetric Frame On A One-Axis Lateral Magnetic Field

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Two-Axis Electromagnetic Scanner Using an Asymmetric Frame on a One-Axis Lateral Magnetic Field;Journal of Microelectromechanical Systems;2024-08

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