Two-Axis Electromagnetic Scanner Using an Asymmetric Frame on a One-Axis Lateral Magnetic Field-Reference-Cited by-同舟云学术

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Two-Axis Electromagnetic Scanner Using an Asymmetric Frame on a One-Axis Lateral Magnetic Field

Published:2024-08 Issue:4 Volume:33 Page:495-502
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Okamoto Yuki¹^ORCID,Nakashima Rihachiro²^ORCID,Oda Ryo²^ORCID,Nguyen Thanh-Vinh¹^ORCID,Takei Yusuke¹^ORCID,Ichiki Masaaki¹^ORCID,Okada Hironao¹^ORCID

Affiliation:

1. Sensing System Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki, Japan

2. Department of Mechanical Engineering, Faculty of Science and Technology, Keio University, Yokohama, Kanagawa, Japan

Funder

JSPS KAKENHI Grant Numbers

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx7/84/10619994/10541112.pdf?arnumber=10541112

Reference20 articles.

1. MEMS Laser Scanners: A Review

2. MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan

3. MEMS-based pico projector display

4. Eye-safe diode laser Doppler lidar with a MEMS beam-scanner

5. Centimeter-scale MEMS scanning mirrors for high power laser application

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 3.8 × 3.8 mm² compact piezoelectric resonant MEMS scanner using fork-shaped and ring-shaped actuators;Journal of Micromechanics and Microengineering;2024-09-05

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