Efficient Yield Estimation of RF-MEMS Using Vector Fitting Based Neuro-Transfer Models
Author:
Affiliation:
1. Peking University,School of Integrated Circuits,Beijing,China
2. Institute of Computational Mathematics, Chinese Academy of Sciences,Beijing,China
Funder
National Key Laboratory of Science and Technology on Micro/Nano Fabrication
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10439241/10439292/10439481.pdf?arnumber=10439481
Reference8 articles.
1. A Bidirectional Deep Learning Approach for Designing MEMS Sensors
2. A Generalized Polynomial Chaos-Based Approach to Analyze the Impacts of Process Deviations on MEMS Beams
3. Yield-aware multi-objective optimization of a MEMS accelerometer system using QMC-based methodologies
4. Manufacturing yield and cost estimation of a MEMS accelerometer based on statistical uncertainty analysis
5. Deep learning for non-parameterized MEMS structural design
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