Yield-aware multi-objective optimization of a MEMS accelerometer system using QMC-based methodologies-Reference-Cited by-同舟云学术

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Yield-aware multi-objective optimization of a MEMS accelerometer system using QMC-based methodologies

Published:2020-09 Issue: Volume:103 Page:104876
ISSN:0026-2692
Container-title:Microelectronics Journal
language:en
Short-container-title:Microelectronics Journal

Author:

Pak Murat,Fernandez Francisco V.,Dundar Gunhan

Publisher

Elsevier BV

Subject

General Engineering

Reference22 articles.

1. Streamlining the design of MEMS devices: an acceleration sensor;Tan;IEEE Circ. Syst. Mag.,2008

2. Hierarchical MEMS synthesis and optimization;Zhang,2005

3. A modeling approach to include mechanical microsystem components into the system simulation;Neul,1998

4. Optimization of a MEMS accelerometer using MOEA/D evolutionary algorithm;Pak,2017

5. Hierarchical evolutionary synthesis of MEMS;Fan,2004

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Efficient Yield Estimation of RF-MEMS Using Vector Fitting Based Neuro-Transfer Models;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

2. Machine Learning-Based Modeling and Generic Design Optimization Methodology for Radio-Frequency Microelectromechanical Devices;Sensors;2023-04-14

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