Electret charging method based on soft X-ray photoionization for MEMS transducers-Reference-Cited by-同舟云学术

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Electret charging method based on soft X-ray photoionization for MEMS transducers

Published:2012-08 Issue:4 Volume:19 Page:1291-1298
ISSN:1070-9878
Container-title:IEEE Transactions on Dielectrics and Electrical Insulation
language:
Short-container-title:IEEE Trans. Dielect. Electr. Insul.

Author:

Hagiwara Kei,Goto Masahide,Iguchi Yoshinori,Tajima Toshifumi,Yasuno Yoshinobu,Kodama Hidekazu,Kidokoro Kenichi,Suzuki Yuji

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering

Link

http://xplorestaging.ieee.org/ielx5/94/6259971/06260003.pdf?arnumber=6260003

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