A micromachined fully differential lateral accelerometer-Reference-Cited by-同舟云学术

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A micromachined fully differential lateral accelerometer

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Container-title:Proceedings of Custom Integrated Circuits Conference
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Author:

Lemkin M.,Boser B.E.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx3/3769/11004/00510566.pdf?arnumber=510566

Cited by 17 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A novel non-vacuum packaged triaxial accelerometer with differential dual-axis resonantors and torsional elements;Microsystem Technologies;2023-11-06

2. Silicon Sensors;Springer Handbook of Semiconductor Devices;2022-11-11

3. Inertial Sensors;Silicon Sensors and Actuators;2022

4. μ-Coriolis Mass Flow Sensor With Differential Capacitive Readout;IEEE Sensors Journal;2021-03-01

5. A SC Interface with Programmable-Gain Embedded ΔΣ ADC for Monolithic 3-Axis 3-D Stacked Capacitive MEMS Accelerometer;IEEE Sensors Journal;2017

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