1. Jiangsu Provincial Key Laboratory of Advanced Photonic and Electronic Materials, School of Electronic Science and Engineering, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, China
2. College of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing, China
3. State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
4. Yongjiang Laboratory, Ningbo, China