1. Institute of Pioneer Semiconductor Innovation, National Yang-Ming Chiao-Tung University, Hsinchu, Taiwan
2. Department of Material Science and Engineering, National Yang-Ming Chiao-Tung University, Hsinchu, Taiwan
3. International College of Semiconductor Technology, National Yang-Ming Chiao-Tung University, Hsinchu, Taiwan
4. Taiwan Semiconductor Research Institute, Hsinchu, Taiwan