Author:
Wang C.J.,Wise R.,Shaohua Liu ,Haigis J.,Farquharson S.,Fowler B.
Cited by
2 articles.
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1. A Novel Method for Measuring Thickness of Silicon Epitaxial Layer on Silicon Substrate;2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA);2023-07-24
2. Characterization of Thin Films and Coatings;Handbook of Deposition Technologies for Films and Coatings;2010