Enlarging Rayleigh Elimination Window through Modulating Substrate and LiNbO3 Cut Angle for Fabricating LNOI-Based Spurious-Free Wideband SAW Filters
Author:
Affiliation:
1. Key Laboratory of Advanced Materials (MOE), School of Materials Science and Engineering, Tsinghua University,Beijing,China
2. National Center for Nanoscience and Technology,Beijing,China
3. SHOULDER Electronics Limited,Wuxi,Jiangsu,China
Funder
National Natural Science Foundation of China
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9957114/9957143/09957406.pdf?arnumber=9957406
Reference10 articles.
1. Thin-film lithium niobate-on-insulator (LNOI) shear horizontal surface acoustic wave resonators
2. High-performance surface acoustic wave resonators in the 1 to 3 GHz range using a ScAlN/6H-SiC structure
3. Surface-Acoustic-Wave Devices Based on Lithium Niobate and Amorphous Silicon Thin Films on a Silicon Substrate
4. Wideband and Low-Loss Surface Acoustic Wave Filter Based on 15° YX-LiNbO₃/SiO₂/Si Structure
5. 3.5 GHz longitudinal leaky surface acoustic wave resonator using a multilayered waveguide structure for high acoustic energy confinement
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1. High-Performance Wideband SAW Filters on LNOI Platform;2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM);2024-05-13
2. A Dispersion-Engineered YX-LN/SIO2/Sapphire SH-SAW Resonator for Enhanced Electromechanical Coupling and Rayleigh Mode Suppression;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
3. A Novel SAW Resonator with Anti-Groove Structure Based on Heterogeneous Substrate;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03
4. SAW Filters on LiNbO3/SiC Heterostructure for 5G n77 and n78 Band Applications;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2023-09
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