Extreme value analysis of the impact of the effective gap tolerance on the acoustic transmit and receive performance of reverse-CMUT arrays-Reference-Cited by-同舟云学术

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Extreme value analysis of the impact of the effective gap tolerance on the acoustic transmit and receive performance of reverse-CMUT arrays

Published:2022-10-10 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE International Ultrasonics Symposium (IUS)
language:
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Author:

La Mura Monica¹,Bagolini Alvise²,Lamberti Patrizia¹,Savoia Alessandro S.³

Affiliation:

1. University of Salerno,Dept. of Information and Electrical Engineering and Applied Mathematics,Fisciano,SA,Italy

2. Micro Nano Facility, Bruno Kessler Foundation,Trento,Italy

3. Roma Tre University,Dept. of Industrial Electronic and Mechanical Engineering,Rome,Italy

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9957114/9957143/09958299.pdf?arnumber=9958299

Reference13 articles.

1. Numerical Evaluation of the Effect of Geometric Tolerances on the High-Frequency Performance of Graphene Field-Effect Transistors

2. Robust Design of Electromagnetic Systems Based on Interval Taylor Extension Applied to a Multiquadric Performance Function

3. Calculation and measurement of electromechanical coupling coefficient of capacitive micromachined ultrasonic transducers

4. Fabrication process for CMUT arrays with polysilicon electrodes, nanometre precision cavity gaps and through-silicon vias

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