Ultra-Low-Voltage High-Efficiency CMUTs with Piston-Structured Plates for Fill Level Sensing-Reference-Cited by-同舟云学术

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Ultra-Low-Voltage High-Efficiency CMUTs with Piston-Structured Plates for Fill Level Sensing

Published:2022-10-10 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE International Ultrasonics Symposium (IUS)
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Author:

Merbeler Fabian¹,Wismath Sonja²,Haubold Marco³,Bretthauer Christian⁴,Kupnik Mario²

Affiliation:

1. Measurement and Sensor Technology Group, TU Darmstadt; Infineon Technologies AG Darmstadt,Munich,Germany

2. Measurement and Sensor Technology Group, TU Darmstadt,Darmstadt,Germany

3. Infineon Technologies Dresden,Dresden,Germany

4. Infineon Technologies AG,Munich,Germany

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9957114/9957143/09957501.pdf?arnumber=9957501

Reference21 articles.

1. Capacitive micromachined ultrasonic transducer (CMUT) for MR-guided noninvasive therapeutic ultrasound applications

2. Capacitive micromachined ultrasonic transducers with piston-shaped membranes: fabrication and experimental characterization

3. Dual-electrode CMUT with non-uniform membranes for high electromechanical coupling coefficient and high bandwidth operation

4. Performance and reliability of new CMUT design with improved efficiency

5. High-Efficiency Output Pressure Performance Using Capacitive Micromachined Ultrasonic Transducers with Substrate-Embedded Springs

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