Performance and reliability of new CMUT design with improved efficiency

Author:

Jeong Byung-Gil,Kim Dong-Kyun,Hong Seog-Woo,Chung Seok-Whan,Shin Hyung-Jae

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. Medical imaging with capacitive micromachined ultrasound transducer (cMUT) arrays;Mills;Proceedings of the IEEE Ultrasonics Symposium,2004

2. Capacitive micromachined ultrasonic transducer (cMUT) made by a novel reverse fabrication process;Caliano;Proceedings of the IEEE Ultrasonics Symposium,2005

3. Capacitive micromachined ultrasonic transducers with piston-shaped membrane: fabrication and experimental characterization;Huang;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,2009

4. CMUT with substrate-embedded springs for non-flexural plate movement;Nikoozadeh,2010

5. Dual-electrode CMUT with non-uniform membrane for high electromechanical coupling coefficient and high bandwidth operation;Guldiken;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,2009

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1. High-Performance Electrode-Post CMUTs: Fabrication Details and Best Practices;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2023-10

2. Reliability of collapse mode CMUT;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03

3. Implementation of an accelerated electrical ageing protocol for Capacitive Micromachined Ultrasonic Transducers (CMUT);2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03

4. cMUT technology developments;Zeitschrift für Medizinische Physik;2023-08

5. Ultra-Low-Voltage High-Efficiency CMUTs with Piston-Structured Plates for Fill Level Sensing;2022 IEEE International Ultrasonics Symposium (IUS);2022-10-10

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