Spurious-Free Shear-horizontal SAW Resonators Using LiTaO3/SiO2/Si Substrate
Author:
Affiliation:
1. School of Information Science and Technology, Fudan University,Shanghai,China
2. Institute of Novel Semiconductors, Shandong University,Jinan,China
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9957114/9957143/09958447.pdf?arnumber=9958447
Reference21 articles.
1. Enhancement of effective electromechanical coupling factor by mass loading in layered SAW device structures
2. Ultra-Large-Coupling and Spurious-Free SH0 Plate Acoustic Wave Resonators Based on Thin LiNbO3
3. Comparative Study of Acoustic Wave Devices Using Thin Piezoelectric Plates in the 3–5-GHz Range
4. Large Coupling Acoustic Wave Resonators Based on LiNbO₃/SiO₂/Si Functional Substrate
5. 3.5 GHz longitudinal leaky surface acoustic wave resonator using a multilayered waveguide structure for high acoustic energy confinement
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Influence of the Tilted IDT on Nonlinear Harmonic Signals in SAW Resonators on LiNbO3/SiO2/Si Structure;2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM);2024-05-13
2. L-band Lithium Niobate-On-Insulator SH0 Resonators Avoiding Transverse Spurious Modes through Electrode Apodization;2023 53rd European Microwave Conference (EuMC);2023-09-19
3. Suppression of Transverse Spurious Modes on 30°YX-Cut Lithium Niobate-On-Insulator SH0 Resonators Through Electrode Rhomboidal Apodization;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03
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