Large Coupling Acoustic Wave Resonators Based on LiNbO₃/SiO₂/Si Functional Substrate

Author:

Hsu Tzu-HsuanORCID,Tseng Kuan-Ju,Li Ming-HuangORCID

Funder

Ministry of Science and Technology (MOST) of Taiwan

Center for Nanotechnology, Materials Science and Microsystems of National Tsing Hua University for device fabrication

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Cited by 69 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Low-Loss N79 Band SAW Filter With 16.0% FBW Based on15° Y-X LiNbO₃/SiC Structure;IEEE Electron Device Letters;2024-07

2. Twist piezoelectricity: giant electromechanical coupling in magic-angle twisted bilayer LiNbO3;Nature Communications;2024-06-12

3. Spectrum-Clean Dispersion-Engineered YX-LN/SiO₂/Si Wideband SH-SAW Resonators With Crossed Interdigital Transducers;IEEE Transactions on Electron Devices;2024-06

4. Near 6-GHz Longitudinal Leaky SAW Filters with Spurious Mitigation on LiNbO3/SiO2/SiC Platform;2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM);2024-05-13

5. High-Performance Wideband SAW Filters on LNOI Platform;2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM);2024-05-13

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