A Flip-Chip Alignment System With the Property of Deviation Self-Correction at the Nanoscale-Reference-Cited by-同舟云学术

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A Flip-Chip Alignment System With the Property of Deviation Self-Correction at the Nanoscale

Published:2021-03 Issue:3 Volume:68 Page:2345-2355
ISSN:0278-0046
Container-title:IEEE Transactions on Industrial Electronics
language:
Short-container-title:IEEE Trans. Ind. Electron.

Author:

He Sifeng^ORCID,Tang Hui^ORCID,Zhang Kaifu,Chen Chuangbin,Wang Jianglin,Zhu Zhongyuan^ORCID,Gao Jian^ORCID,Cui Chengqiang,Chen Xin

Funder

National Natural Science Foundation of China

Guangdong Science and Technology Department

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Control and Systems Engineering

Link

http://xplorestaging.ieee.org/ielx7/41/9271830/09005403.pdf?arnumber=9005403

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