Proposal of a Precision Probe-Tilt Adjustment with the RF Signal Detection Technique
Author:
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/8482236/8500784/08500884.pdf?arnumber=8500884
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Exploring Nanorobotics Integration with Microwave and Millimeter-Wave Techniques for Advanced On-wafer Measurement;2024 5th International Conference in Electronic Engineering, Information Technology & Education (EEITE);2024-05-29
2. Tilt-related alignment issues in miniature micromechanical on-wafer electrical probes composed of multiple flexible microcantilevers;Engineering Research Express;2024-03-01
3. Automated and Robotic On-Wafer Probing Station;2023 IEEE Symposium on Wireless Technology & Applications (ISWTA);2023-08-15
4. Nanorobotics and Automatic On-Wafer Probe Station with Nanometer Positionning Accuracy;2023 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization (NEMO);2023-06-28
5. Compensating Probe Misplacements in On-Wafer S-Parameters Measurements;IEEE Transactions on Microwave Theory and Techniques;2022-11
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