84%-Efficiency Fully Integrated Voltage Regulator for Computing Systems Enabled by 2.5-D High-Density MIM Capacitor
Author:
Affiliation:
1. Department of Electrical Engineering, Katholieke Universiteit Leuven, Leuven, Belgium
2. IMEC, Heverlee, Belgium
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Software
Link
http://xplorestaging.ieee.org/ielx7/92/9761844/09718044.pdf?arnumber=9718044
Reference14 articles.
1. 91.5%-efficiency fully integrated voltage regulator with 86 fF/?m²-high-density 2.5D MIM capacitor;lin;Proc Symp VLSI Technol,2021
2. A manufacturable interposer MIM decoupling capacitor with robust thin high-K dielectric for heterogeneous 3D IC CoWoS wafer level system integration
3. Active Si interposer for 3D IC integrations
4. Integrated Deep Trench Capacitor in Si Interposer for CoWoS Heterogeneous Integration
5. High-performance (EOT < 0.4nm, Jg 10?? A/cm²) ALD-deposited RuSrTiO? stack for next generations DRAM pillar capacitor;popovici;IEDM Tech Dig,2018
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