Coplanar waveguides on silicon substrate with thick oxidized porous silicon (OPS) layer
Author:
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
General Physics and Astronomy,General Engineering
Link
http://xplorestaging.ieee.org/ielx4/75/15867/00736246.pdf?arnumber=736246
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5. Electrical Isolation Applications of PSi in Microelectronics;Porous Silicon: From Formation to Applications: Optoelectronics, Microelectronics, and Energy Technology Applications, Volume Three;2016-01-07
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