1. Advanced Materials and Device Analysis Group
2. ICRF, NXP Semiconductors, Gerstweg 2, 6534 AE Nijmegen, The Netherlands
3. Fraunhofer Inst. for Solid-State Physics (IAF), Tullastraße 72, 79108 Freiburg, Germany
4. Inst. for Microelectronics, TU Wien, Gußhausstraße 27–29/E360, 1040 Wien, Austria