Design simulation and analysis of piezoresistive micro pressure sensor for pressure range of 0 to 1MPa
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Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/7948634/7955174/07955243.pdf?arnumber=7955243
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Temperature Compensation Method for Piezoresistive Pressure Sensors Based on Gated Recurrent Unit;Sensors;2024-08-21
2. Formulation analysis and follow-up study of multi-turn configuration for performance enhancement of MEMS piezoresistive pressure sensor utilized for low-pressure measurement applications;Sensor Review;2024-05-21
3. Prefabrication design, theoretical framework and simulation demonstration of a meander-shaped MEMS piezoresistive pressure sensor implanted on silicon substrate circular diaphragm for enhancement of key performance parameters utilized for low-pressure applications;Journal of Computational Electronics;2024-02-18
4. Optimization of linearity of piezoresistive pressure sensor based on pade approximation;Sensors and Actuators A: Physical;2023-12
5. Investigation of MEMS Single Turn Meander-Shaped Silicon Carbide Piezoresistive Pressure Sensor on a Clamped Circular Diaphragm for High Pressure Harsh Environment Applications;Journal of Circuits, Systems and Computers;2023-08-28
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