An Inertial-Grade, Micromachined Vibrating Beam Accelerometer-Reference-Cited by-同舟云学术

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An Inertial-Grade, Micromachined Vibrating Beam Accelerometer

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Container-title:Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95
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Author:

Roszhart T.V.,Jerman H.,Drake J.,de Cotiis C.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx4/5818/15527/00721917.pdf?arnumber=721917

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Review on MEMS Silicon Resonant Accelerometers;Journal of Microelectromechanical Systems;2024-04

2. Study of a Novel MEMS Accelerometer with Low Noise Reduced by Actuators;Integrated Ferroelectrics;2013-01

3. Design, fabrication and analysis of micromachined high sensitivity and 0% cross-axis sensitivity capacitive accelerometers;Microsystem Technologies;2009-09-01

4. Development and Performance Test of a Differential Type Resonant Accelerometer;AIAA Guidance, Navigation, and Control Conference and Exhibit;2003-06-22

5. Development of a Micromachined Vibrating Beam Multisensor (MVBM) for tactical guidance and navigation applications;AIAA Guidance, Navigation, and Control Conference and Exhibit;2000-08-14

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