Study of a Novel MEMS Accelerometer with Low Noise Reduced by Actuators-Reference-Cited by-同舟云学术

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Study of a Novel MEMS Accelerometer with Low Noise Reduced by Actuators

Published:2013-01 Issue:1 Volume:145 Page:68-79
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Dong Linxi¹²,Cui Yingying¹,Huo Weihong¹,Yan Haixia³,Sun Lingling¹

Affiliation:

1. a The Key Laboratory of RF Circuits and System of Ministry of Education , Hangzhou Dianzi University , Hangzhou , 310018 , China

2. b State Key Laboratory of Transducer Technology , Chinese Academy of Sciences , Shanghai , 200050 , China

3. c Toshiba Hydro-Electro Equipments Company , Hangzhou , 311504 , China

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584587.2013.788411

Reference17 articles.

1. An all-silicon single-wafer micro-g accelerometer with a combined surface and bulk micromachining process

2. Low-noise MEMS vibration sensor for geophysical applications

3. An Inertial-Grade, Micromachined Vibrating Beam Accelerometer

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