Author:
Cheng Yu-Hsing,Cook Michael,Kendrick Chris
Cited by
3 articles.
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1. Wafer Level Reliability Monitoring of NBTI Using Polysilicon Heater Structures for Production Measurements;2023 35th International Conference on Microelectronic Test Structure (ICMTS);2023-03-27
2. Utilization of Poly Heater Test Structures in the Characterization of Bias Temperature Instability;2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS);2022-03-21
3. NBTI Characterization with in Situ Poly Heater;2022 IEEE International Reliability Physics Symposium (IRPS);2022-03