Structural and Optical Properties of Nano-Phases in Ar+ Sputtered SiC Surfaces
Author:
Affiliation:
1. Kurukshetra University,Ion Beam Centre,Department of Physics,Kurukshetra,India,136119
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10310172/10310667/10310832.pdf?arnumber=10310832
Reference19 articles.
1. An investigation on the effect of high partial pressure of hydrogen on the nanocrystalline structure of silicon carbide thin films prepared by radio-frequency magnetron sputtering
2. Effect of Substrate Temperature on (Micro/Nano)Structure of a-SiC:H Thin Films Deposited by Radio-Frequency Magnetron Sputtering.
3. Interpretation of Raman spectra of disordered and amorphous carbon
4. Properties of amorphous carbon–silicon alloys deposited by a high plasma density source
5. Study on FN-DLC thin films: (Ⅱ) effect of radio frequency power on the optical band gap of the thin films
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