Matching Network-Boosted 36% Scaln Pmut Linear Array
Author:
Affiliation:
1. Northeastern University,SMART Center,Boston,USA
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699772.pdf?arnumber=9699772
Reference21 articles.
1. Characterization of Epitaxial-PZT/SI Piezoelectric Micromachined Ultrasonic Transducer (PMUT) and its Phased Array System
2. Post-CMOS Compatible Aluminum Nitride MEMS Filters and Resonant Sensors
3. Highly responsive curved aluminum nitride pMUT
4. Piezoelectric coefficients and spontaneous polarization of ScAlN;miguel;Journal of Physics Condensed Matter,2015
5. Doping of Aluminum Nitride and the Impact on Thin Film Piezoelectric and Ferroelectric Device Performance
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1. Design, Fabrication, and Characterization of High-Performance PMUT Arrays Based on Potassium Sodium Niobate;Journal of Microelectromechanical Systems;2024-08
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3. Matching-network boosting enabling reconfigurable pMUTs for IoT sensor node applications;2022 IEEE International Ultrasonics Symposium (IUS);2022-10-10
4. Scandium-Doped Aluminum Nitride PMUT Arrays for Wireless Ultrasonic Powering of Implantables;IEEE Open Journal of Ultrasonics, Ferroelectrics, and Frequency Control;2022
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